TY  - RPRT
TI  - Improvements in Ionized Cluster-Beam Deposition
AU  - Fitzgerald, D. J.
AU  - Compton, L. E.
AU  - Pawlik, E. V.
PY  - 1986
UR  - https://ntrs.nasa.gov/citations/19860000092
ID  - 19860000092
ER  -