@misc{indiciaea393566bf8e5,
  title = {Masking Technique for Ion-Beam Sputter Etching},
  author = {Banks, B. A. and Rutledge, S. K.},
  year = {1986},
  url = {https://ntrs.nasa.gov/citations/19860000295},
  note = {Source identifier: 19860000295}
}