@misc{indiciae2de9e2cb1b0d,
  title = {A laser plotting system for VLSI chip layouts},
  author = {Deutsch, L. J. and Harding, J. A.},
  year = {1985},
  url = {https://ntrs.nasa.gov/citations/19860004997},
  note = {Source identifier: 19860004997}
}