@misc{indiciae3a581eccd9e1,
  title = {Compensation in epitaxial cubic SiC films},
  author = {Segall, B. and Alterovitz, S. A. and Haugland, E. J. and Matus, L. G.},
  year = {1986},
  url = {https://ntrs.nasa.gov/citations/19860015796},
  note = {Source identifier: 19860015796}
}