@misc{indiciae455282f02456,
  title = {Amorphous metallic films in silicon metallization systems},
  author = {So, F. and Kolawa, E. and Nicolet, M. A.},
  year = {1985},
  url = {https://ntrs.nasa.gov/citations/19860019910},
  note = {Source identifier: 19860019910}
}