@misc{indiciae008dc66012d4,
  title = {Substrate heating rates for planar and cylindrical-post magnetron sputtering sources},
  author = {Thornton, J. A. and Lamb, J. L.},
  year = {1984},
  url = {https://ntrs.nasa.gov/citations/19860031529},
  note = {Source identifier: 19860031529}
}