@misc{indiciae6076e1a369c2,
  title = {Sputtered W-N diffusion barriers},
  author = {Kattelus, H. P. and Kolawa, E. and Affolter, K. and Nicolet, M.-A.},
  year = {1985},
  url = {https://ntrs.nasa.gov/citations/19860032738},
  note = {Source identifier: 19860032738}
}