@misc{indiciaed34dcdfe6505,
  title = {Deep, Precise Etching in Semiconductors},
  author = {Shlichta, P. J. and Barth, P. W.},
  year = {1987},
  url = {https://ntrs.nasa.gov/citations/19870000154},
  note = {Source identifier: 19870000154}
}