@misc{indiciae67d519e18b24,
  title = {Amosphous diffusion barriers},
  author = {Kolawa, E. and So, F. C. T. and Nicolet, M-A.},
  year = {1986},
  url = {https://ntrs.nasa.gov/citations/19870006986},
  note = {Source identifier: 19870006986}
}