@misc{indiciae6870194d9988,
  title = {Nondestructive SEM for surface and subsurface wafer imaging},
  author = {Propst, Roy H. and Bagnell, C. Robert and Cole, Edward I., Jr. and Davies, Brian G. and Dibianca, Frank A. and Johnson, Darryl G. and Oxford, William V. and Smith, Craig A.},
  year = {1987},
  url = {https://ntrs.nasa.gov/citations/19870017773},
  note = {Source identifier: 19870017773}
}