@misc{indiciae8e31e3f6c300,
  title = {Interaction of low-energy implanted atomic H with slow and fast diffusing metallic impurities in Si},
  author = {Singh, R. and Fonash, S. J. and Rohatgi, A.},
  year = {1986},
  url = {https://ntrs.nasa.gov/citations/19870029785},
  note = {Source identifier: 19870029785}
}