TY  - RPRT
TI  - Interaction of low-energy implanted atomic H with slow and fast diffusing metallic impurities in Si
AU  - Singh, R.
AU  - Fonash, S. J.
AU  - Rohatgi, A.
PY  - 1986
UR  - https://ntrs.nasa.gov/citations/19870029785
ID  - 19870029785
ER  -