@misc{indiciaeee009348fa0f,
  title = {An advanced microcomputer design for processing of semiconductor materials},
  author = {Bjoern, L. and Lindkvist, L. and Zaar, J.},
  year = {1988},
  url = {https://ntrs.nasa.gov/citations/19880008319},
  note = {Source identifier: 19880008319}
}