@misc{indiciae0e2bcaed79e5,
  title = {Improved beta-SiC heteroepitaxial films using off-axis Si substrates},
  author = {Powell, J. A. and Matus, L. G. and Kuczmarski, M. A. and Chorey, C. M. and Cheng, T. T.},
  year = {1987},
  url = {https://ntrs.nasa.gov/citations/19880023204},
  note = {Source identifier: 19880023204}
}