@misc{indiciaeda91edadde57,
  title = {Variable angle spectroscopic ellipsometry - Application to GaAs-AlGaAs multilayer homogeneity characterization},
  author = {Alterovitz, Samuel A. and Snyder, Paul G. and Merkel, Kenneth G. and Woollam, John A. and Radulescu, David C.},
  year = {1988},
  url = {https://ntrs.nasa.gov/citations/19880052912},
  note = {Source identifier: 19880052912}
}