TY  - RPRT
TI  - Variable angle spectroscopic ellipsometry - Application to GaAs-AlGaAs multilayer homogeneity characterization
AU  - Alterovitz, Samuel A.
AU  - Snyder, Paul G.
AU  - Merkel, Kenneth G.
AU  - Woollam, John A.
AU  - Radulescu, David C.
PY  - 1988
UR  - https://ntrs.nasa.gov/citations/19880052912
ID  - 19880052912
ER  -