@misc{indiciae9ee2058e5131,
  title = {Making Submicron CoSi2 Structures On Silicon Substrates},
  author = {Nieh, Simon K. W. and Lin, True-Lon and Fathauer, Robert W.},
  year = {1989},
  url = {https://ntrs.nasa.gov/citations/19890000482},
  note = {Source identifier: 19890000482}
}