TY  - RPRT
TI  - Making Submicron CoSi2 Structures On Silicon Substrates
AU  - Nieh, Simon K. W.
AU  - Lin, True-Lon
AU  - Fathauer, Robert W.
PY  - 1989
UR  - https://ntrs.nasa.gov/citations/19890000482
ID  - 19890000482
ER  -