@misc{indiciae7f7e2a14bf15,
  title = {Healing Voids In Interconnections In Integrated Circuits},
  author = {Cuddihy, Edward F. and Lawton, Russell A. and Gavin, Thomas},
  year = {1989},
  url = {https://ntrs.nasa.gov/citations/19890000484},
  note = {Source identifier: 19890000484}
}