@misc{indiciaef3e0237964d2,
  title = {Finite element analysis of a micromechanical deformable mirror device},
  author = {Sheerer, T. J. and Nelson, W. E. and Hornbeck, L. J.},
  year = {1989},
  url = {https://ntrs.nasa.gov/citations/19890013582},
  note = {Source identifier: 19890013582}
}