TY  - RPRT
TI  - Finite element analysis of a micromechanical deformable mirror device
AU  - Sheerer, T. J.
AU  - Nelson, W. E.
AU  - Hornbeck, L. J.
PY  - 1989
UR  - https://ntrs.nasa.gov/citations/19890013582
ID  - 19890013582
ER  -