@misc{indiciae8f4cff744c4c,
  title = {Plasma deposited silicon nitride for indium phosphide encapsulation},
  author = {Valco, G. J. and Kapoor, V. J. and Biedenbender, M. D. and Williams, W. D.},
  year = {1989},
  url = {https://ntrs.nasa.gov/citations/19890040423},
  note = {Source identifier: 19890040423}
}