TY  - RPRT
TI  - Plasma deposited silicon nitride for indium phosphide encapsulation
AU  - Valco, G. J.
AU  - Kapoor, V. J.
AU  - Biedenbender, M. D.
AU  - Williams, W. D.
PY  - 1989
UR  - https://ntrs.nasa.gov/citations/19890040423
ID  - 19890040423
ER  -