@misc{indiciaece32daf8092c,
  title = {CMOS Process Monitor},
  author = {Buehler, M. G. and Allen, R. A. and Blaes, B. R. and Jenings, G. A. and Hicks, K. A.},
  year = {1988},
  url = {https://ntrs.nasa.gov/citations/19890044953},
  note = {Source identifier: 19890044953}
}