@misc{indiciae832c5721316f,
  title = {Comb/serpentine/cross-bridge test structure for fabrication process evaluation},
  author = {Sayah, Hoshyar R. and Buehler, Martin G.},
  year = {1988},
  url = {https://ntrs.nasa.gov/citations/19890044956},
  note = {Source identifier: 19890044956}
}