TY  - RPRT
TI  - Comb/serpentine/cross-bridge test structure for fabrication process evaluation
AU  - Sayah, Hoshyar R.
AU  - Buehler, Martin G.
PY  - 1988
UR  - https://ntrs.nasa.gov/citations/19890044956
ID  - 19890044956
ER  -