@misc{indiciaef1f96c2ae55f, title = {Diffusion of Si in thin CoSi2 layers}, author = {Schowengerdt, F. D. and Lin, T. L. and Fathauer, R. W. and Grunthaner, P. J.}, year = {1989}, url = {https://ntrs.nasa.gov/citations/19890047313}, note = {Source identifier: 19890047313} }