@misc{indiciaed95da5b263dc,
  title = {Polymer etching in the oxygen afterglow - Increased etch rates with increased reactor loading},
  author = {Lerner, N. R. and Wydeven, T.},
  year = {1989},
  url = {https://ntrs.nasa.gov/citations/19890052743},
  note = {Source identifier: 19890052743}
}