@misc{indiciae053f3e3db5d1,
  title = {EUV efficiency of a 6000-grooves per mm diffraction grating},
  author = {Hurwitz, Mark and Bowyer, Stuart and Edelstein, Jerry and Harada, Tatsuo and Kita, Toshiaki},
  year = {1990},
  url = {https://ntrs.nasa.gov/citations/19900046530},
  note = {Source identifier: 19900046530}
}