TY  - RPRT
TI  - EUV efficiency of a 6000-grooves per mm diffraction grating
AU  - Hurwitz, Mark
AU  - Bowyer, Stuart
AU  - Edelstein, Jerry
AU  - Harada, Tatsuo
AU  - Kita, Toshiaki
PY  - 1990
UR  - https://ntrs.nasa.gov/citations/19900046530
ID  - 19900046530
ER  -