@misc{indiciae5468e53687bf,
  title = {Micromachined silicon tunnel sensor for motion detection},
  author = {Kenny, T. W. and Waltman, S. B. and Reynolds, J. K. and Kaiser, W. J.},
  year = {1991},
  url = {https://ntrs.nasa.gov/citations/19910035877},
  note = {Source identifier: 19910035877}
}