TY  - RPRT
TI  - Micromachined silicon tunnel sensor for motion detection
AU  - Kenny, T. W.
AU  - Waltman, S. B.
AU  - Reynolds, J. K.
AU  - Kaiser, W. J.
PY  - 1991
UR  - https://ntrs.nasa.gov/citations/19910035877
ID  - 19910035877
ER  -