@misc{indiciae4ad9b17618f4,
  title = {Sputtered Ta-Si-N diffusion barriers in Cu metallizations for Si},
  author = {Kolawa, E. and Pokela, P. J. and Reid, J. S. and Chen, J. S. and Nicolet, Marc A. and Ruiz, R. P.},
  year = {1991},
  url = {https://ntrs.nasa.gov/citations/19910059321},
  note = {Source identifier: 19910059321}
}