@misc{indiciae1e81f09e8796,
  title = {Optical coating technology for the EUV},
  author = {Osantowski, J. F. and Keski-Kuha, R. A. M. and Herzig, H. and Toft, A. R. and Gum, J. S. and Fleetwood, C. M.},
  year = {1991},
  url = {https://ntrs.nasa.gov/citations/19920036550},
  note = {Source identifier: 19920036550}
}