@misc{indiciae68dc843ef93a,
  title = {High rate reactive sputtering in an opposed cathode closed-field unbalanced magnetron sputtering system},
  author = {Sproul, William D. and Rudnik, Paul J. and Graham, Michael E. and Rohde, Suzanne L.},
  year = {1990},
  url = {https://ntrs.nasa.gov/citations/19920049765},
  note = {Source identifier: 19920049765}
}