TY  - RPRT
TI  - High rate reactive sputtering in an opposed cathode closed-field unbalanced magnetron sputtering system
AU  - Sproul, William D.
AU  - Rudnik, Paul J.
AU  - Graham, Michael E.
AU  - Rohde, Suzanne L.
PY  - 1990
UR  - https://ntrs.nasa.gov/citations/19920049765
ID  - 19920049765
ER  -