TY  - RPRT
TI  - Study of temperature-dependent ultrathin oxide growth on Si(111) using variable-angle spectroscopic ellipsometry
AU  - De, Bhola N.
AU  - Woollam, John A.
PY  - 1990
UR  - https://ntrs.nasa.gov/citations/19920049790
ID  - 19920049790
ER  -