TY  - RPRT
TI  - Micromachined Tunneling Accelerometer
AU  - Kenny, Thomas W.
AU  - Waltman, Stephen B.
AU  - Kaiser, William J.
AU  - Reynolds, Joseph K.
PY  - 1993
UR  - https://ntrs.nasa.gov/citations/19930000708
ID  - 19930000708
ER  -