@misc{indiciae5aea41c98fd4,
  title = {Diamond film deposition using microwave plasmas under low pressures},
  author = {Shing, Y. H. and Pool, F. S. and Rich, D. H.},
  year = {1991},
  url = {https://ntrs.nasa.gov/citations/19930056607},
  note = {Source identifier: 19930056607}
}