TY  - RPRT
TI  - Diamond film deposition using microwave plasmas under low pressures
AU  - Shing, Y. H.
AU  - Pool, F. S.
AU  - Rich, D. H.
PY  - 1991
UR  - https://ntrs.nasa.gov/citations/19930056607
ID  - 19930056607
ER  -