@misc{indiciae3c4d57fb812e,
  title = {Making Rectangular Apertures In Silicon},
  author = {Leviton, Douglas B. and Jhabvala, Murzy D. and Mott, Brent and Manthripragada, Sridhar},
  year = {1994},
  url = {https://ntrs.nasa.gov/citations/19940000119},
  note = {Source identifier: 19940000119}
}