TY  - RPRT
TI  - Making Rectangular Apertures In Silicon
AU  - Leviton, Douglas B.
AU  - Jhabvala, Murzy D.
AU  - Mott, Brent
AU  - Manthripragada, Sridhar
PY  - 1994
UR  - https://ntrs.nasa.gov/citations/19940000119
ID  - 19940000119
ER  -