TY  - RPRT
TI  - Improved Dielectric Films For Capacitors
AU  - Yen, Shiao-Ping S.
AU  - Lewis, Carol R.
AU  - Cygan, Peter J.
AU  - Jow, T. Richard
PY  - 1994
UR  - https://ntrs.nasa.gov/citations/19940000377
ID  - 19940000377
ER  -