@misc{indiciae1fa4e258565f,
  title = {Etching Polymer Optical Waveguides With Atomic Beams},
  author = {Minton, Timothy K. and Perry, Joseph W.},
  year = {1994},
  url = {https://ntrs.nasa.gov/citations/19940000603},
  note = {Source identifier: 19940000603}
}