@misc{indiciae4ac3e734b29d,
  title = {Macro, mini, micro and nano (M(sup 3)N) technologies for the future},
  author = {Friedrich, Craig R. and Warrington, Robert O. and Gao, Robert X. and Lin, Gang},
  year = {1993},
  url = {https://ntrs.nasa.gov/citations/19940025282},
  note = {Source identifier: 19940025282}
}