@misc{indiciaeca157bc190ea,
  title = {Sputter process investigation: Material and environment interaction processes investigation},
  author = {Williams, John R. and Bozack, Michael J. and Fromhold, Albert T.},
  year = {1994},
  url = {https://ntrs.nasa.gov/citations/19940029570},
  note = {Source identifier: 19940029570}
}