@misc{indiciae3c5fd6da045e,
  title = {Electromagnetically levitated vibration isolation system for the manufacturing process of silicon monocrystals},
  author = {Kanemitsu, Yoichi and Watanabe, Katsuhide and Yano, Kenichi and Mizuno, Takayuki},
  year = {1994},
  url = {https://ntrs.nasa.gov/citations/19940031399},
  note = {Source identifier: 19940031399}
}