TY  - RPRT
TI  - Electromagnetically levitated vibration isolation system for the manufacturing process of silicon monocrystals
AU  - Kanemitsu, Yoichi
AU  - Watanabe, Katsuhide
AU  - Yano, Kenichi
AU  - Mizuno, Takayuki
PY  - 1994
UR  - https://ntrs.nasa.gov/citations/19940031399
ID  - 19940031399
ER  -