@misc{indiciaedfb830dd0d32, title = {JTEC Panel report on microelectromechanical systems in Japan}, author = {Wise, Kensall D. and Muller, Richard S. and Guckel, Henry and Giachino, Joseph M. and Hocker, G. Benjamin and Jacobsen, Stephen C.}, year = {1994}, url = {https://ntrs.nasa.gov/citations/19950021818}, note = {Source identifier: 19950021818} }