@misc{indiciae2631037ea77d,
  title = {High rate reactive sputtering of MoN(x) coatings},
  author = {Rudnik, Paul J. and Graham, Michael E. and Sproul, William D.},
  year = {1991},
  url = {https://ntrs.nasa.gov/citations/19950047708},
  note = {Source identifier: 19950047708}
}